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TCS Reactor Effluent Clean-Up From Consulting Engineers SML Associates

Two techniques are provided to remove important boron, carbon and phosphorus contaminants from the TCS reactor effluent before distillation. The first technique uses a heated cyclone with hydrogen purge to remove titanium diboride as a solid instead of allowing it to react to the gaseous titanium and boron chlorides. The second uses a chlorosilane resistant membrane system to recover hydrogen and hydrogen chloride while rejecting methane and phosphine to the scrubber.
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Economic Benefits

  • Cut hydrogen purchase costs by a factor of 10
  • Lower distillation operating cost at lower and stable impurity levels
  • Increase net production of TCS
  • Reduce waste of chlorosilanes during ash removal

Environmental
& Safety Benefits

  • Spent MGS ash purged by hot hydrogen to remove acid gases
  • Spent MGS handling is much safer
  • Reduce scrubber emissions and waste generation

Operational Benefits

  • Simple automated continuous operation
  • Tested membrane is inert to chlorosilanes

Purity Benefits

  • Reduce boron, carbon and phosphorus contaminants early
  • Avoid impurity spikes
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